TÜBİTAK | MARMARA RESEARCH CENTER INVESTIGATION THE INFLUENCE OF DOPING ELEMENTS ON ETCHED ZINC OXIDE THIN FILMS DEPOSITED BY SPUTTERING TECHNIQUE by Alp Osman Kodolbaş, Ümmü Mustafaoğlu, Birsen Handem Ergün, Nilüfer Evcimen Duygulu, Okan Yılmaz, Sema Memiş, Öcal Tuna, Refika Budakoğlu, Seniz Türküz, Ahmet Karaaslan 2017 ICG Annual Meeting and 32nd Şişecam Glass Symposium, Haliç Congress Center, Istanbul, Turkey, October 22-25th 2017. SCIENCE TO TECHNOLOGY TECHNOLOGY TO INDUSTRY

OUTLINE World photovoltaic market and TF photovoltaics TCO applications and requirements for TF photovoltaics Project outline and summary of succeeding talks

WORLD PHOTOVOLTAIC MARKET RENEWABLES 2017, GLOBAL STATUS REPORT

WORLD PHOTOVOLTAIC MARKET EPIA Global Market Outlook for Photovoltaics 2014-2018

WORLD THIN FILM PHOTOVOLTAIC SHIPMENTS SPV Market Research 2017

WORLD THIN FILM PHOTOVOLTAIC MARKET SHARE Fraunhofer ISE 2017

WORLD THIN FILM PHOTOVOLTAIC MODULE PRODUCTION Fraunhofer ISE 2017

LEANING CURVE OF PHOTOVOLTAICS Pvxchange 2011-2017

WORLD TCO MARKET Allied Market Research, Global Opportunity Analysis and Industry Forecast, 2013 - 2020

WORLD TCO MARKET Insight Media Report, 2014

WORLD TCO MARKET FTO: CVD ITO: Sputtering, PVD AZO: Sputtering, CVD, ALD IDTechEx TCO Market Report, 2012

Nitto Denko Corporation Toyobo Corporation Dupont Teijin Films MAJOR TCO PRODUCERS Nitto Denko Corporation Toyobo Corporation Dupont Teijin Films Eastman Kodak Company Oike & Co., Ltd. Fujifilm Holdings Corporation Allied Market Research, Global Opportunity Analysis and Industry Forecast, 2013 - 2020

THIN FILM SOLAR CELLS/MODULES ISE, 2011

THIN FILM SOLAR CELLS/MODULES ISE, 2011

THIN FILM PHOTOVOLTAIC MODULE FABRICATION

Prof. Dr. Ahmet Karaaslan (PC) Prof. Dr. Ahmet Ekerim INVESTIGATION THE INFLUENCE OF DOPING ELEMENTS ON ETCHED ZINC OXIDE THIN FILMS DEPOSITED BY SPUTTERING TECHNIQUE Prof. Dr. Ahmet Karaaslan (PC) Prof. Dr. Ahmet Ekerim Dr. Nilüfer Evcimen Duygulu Doç. Dr. Alp Osman Kodolbaş (C) Dr. Okan Yılmaz Dr. Sema Memiş (TF Solar Cells) Dr. Seniz Türküz (C) Dr. Refika Budakoğlu Dr. Öcal Tuna Project Scholars: Ümmü Mustafaoğlu Birsen Handem Ergünhan

REQUIREMENTS OF TCO FOR LARGE SCALE PV High transparency in visible light High conductance High carrier mobility Excellent long term stability Low cost High throughput deposition

REQUIREMENTS FOR TCO FOR LARGE SCALE PV Virang G Shah and David B Wallace, Proceedings IMAPS 37 Annual International Symposium on Microelectronics (2004) 1. Scientific RepoRts | 6:29639 | DOI: 10.1038/srep29639

INVESTIGATION THE INFLUENCE OF DOPING ELEMENTS ON ETCHED ZINC OXIDE THIN FILMS DEPOSITED BY SPUTTERING TECHNIQUE Parameters Experimental Range Details TCO Material ZnO:Al, ZnO:Ga, Zn:Ga:In, MgZnO:Al Substrate dimensions 10x10 cm2 30x40 cm2 TUBITAK Şişecam Deposition method rf-sputtering, pulsed- dc sputtering Post annealing 150-450oC, 1-4 hours At vacuum Texturizing NH4CI, HF, HCl Solutions Solar Cell pm-Si:H single junction PECVD

INVESTIGATION THE INFLUENCE OF DOPING ELEMENTS ON ETCHED ZINC OXIDE THIN FILMS DEPOSITED BY SPUTTERING TECHNIQUE Influence of Doping Elements on Zinc Oxide Thin Films Deposited by Sputtering Nilüfer Evcimen Duygulu, Ümmü Mustafaoğlu, Birsen Handem Ergün, Okan Yılmaz, Alp Osman Kodolbaş, Ahmet Karaaslan

INVESTIGATION THE INFLUENCE OF DOPING ELEMENTS ON ETCHED ZINC OXIDE THIN FILMS DEPOSITED BY SPUTTERING TECHNIQUE Effect of Sputtering Power and Post Annealing Process on Properties of ZnO:Ga Thin Films Birsen Handem Ergünhan, Öcal Tuna, Nilüfer Duygulu, Seniz Türküz

INVESTIGATION THE INFLUENCE OF DOPING ELEMENTS ON ETCHED ZINC OXIDE THIN FILMS DEPOSITED BY SPUTTERING TECHNIQUE Etched Zinc Oxide Thin Films Deposited by Sputtering Technique Nilüfer Evcimen Duygulu, Ümmü Mustafaoğlu, Birsen Handem Ergün, Alp Osman Kodolbaş, Ahmet Karaaslan

INVESTIGATION THE INFLUENCE OF DOPING ELEMENTS ON ETCHED ZINC OXIDE THIN FILMS DEPOSITED BY SPUTTERING TECHNIQUE Development of ZnO:Ga as TCO’s for Thin Film Silicon Solar Cells Okan Yılmaz, Sema Memiş, Ümmü Mustafaoğlu, Birsen Handem Ergün, Nilüfer Evcimen Duygulu, Öcal Tuna, Refika Budakoğlu, Seniz Türküz, Alp Osman Kodolbaş, Ahmet Karaaslan

Thank you very much for your attention Thank you very much for your attention. Presentations within this session are partially supported by TUBITAK under project coordination number 113M953 Assoc. Prof. Dr. Alp Osman KODOLBAŞ alposman.kodolbas@tubitak.gov.tr